16% external quantum efficiency from planar microcavity LEDs at 940nm by precise matching of cavity wavelength

High efficiency substrate emitting microcavity InGaAs/(Al)GaAs 3 QW LEDs are reported. The use of regrowth for cavity resonance tuning and its effect on device performance, are demonstrated. The best results obtained include external quantum efficiencies of 16%. At 5 mA, 1 mW of optical power is delivered with an intensity of 280 µW/sr.