论文信息 - Displacement Model for Dynamic PullIn Analysis and Application in Large-Stroke Electrostatic Actuators

Displacement Model for Dynamic PullIn Analysis and Application in Large-Stroke Electrostatic Actuators

AC-operation of an electrostatically actuated microstructure enables a displacement beyond the quasi-static pull-in voltage and the associated limitation at 1/3 of the gap. When considering dynamics of the actuator structure, displacements of the order of 70% of the full gap become possible by using sine waves as the actuation voltage. A large-displacement analytical model for electrostatic actuators is presented in this paper and the results are compared with measurements. Operation up to 70% of gap has been confirmed at frequencies between 300 and 700 Hz, depending on the gas type and gas pressure of the surrounding medium.

E. Cretu | R. F. Wolffenbuttel | L. A. Rocha

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