Gas-lubricated microbearings for microactuators☆

Abstract This paper proposes the scaling-down of gas-lubricated bearings and their special application in microelectromechanical systems (MEMS). A gas bearing could eliminate the friction problem in microactuators and micromotors because its rubbing surfaces are completely separated by a film of gas. Two kinds of microbearings, the aerodynamic spiral-grooved type and an externally pressurized type, have been designed and fabricated by processes derived from IC fabrication processes. They have been used in micromotors with a rotor diameter of 160 μm and a hub diameter of 48 μm.