论文信息 - Ultrahigh Capacitance Density for Multiple ALD-Grown MIM Capacitor Stacks in 3-D Silicon - 字舞流文

Ultrahigh Capacitance Density for Multiple ALD-Grown MIM Capacitor Stacks in 3-D Silicon

M. Kaiser | J. Klootwijk | F. Roozeboom | M. Verheijen | J. Verhoeven | K. Jinesh | W. Dekkers | F.C. van den Heuvel | H. Kim | D. Blin | R. Weemaes | J. Ruigrok