论文信息 - Highly Sensitive Cantilevers, with and without Magnetic Tip, for Magnetic Resonance Force Microscopy

Highly Sensitive Cantilevers, with and without Magnetic Tip, for Magnetic Resonance Force Microscopy

In this paper we present the fabrication and characterization of highly sensitive cantilevers, with and without magnetic tip, used for magnetic resonance force microscopy experiments. The full wafer silicon batch microfabrication was successful and the achieved production yield was about 70%. Cantilevers have been characterized in vacuum, at room temperature, and revealed promising properties for MRFM applications. A cantilever of 500times10times0.34 mum3 dimensions, a resonance frequency of 1670 Hz and a spring constant of 0.00014 N/m, we measured a quality factor of 27000 giving a minimum detectable force of 8times10-17 N/Hz1/2.

G. Boero | S. Mouaziz | A. Dysli | J. Brugger

[1] Jürgen Brugger,et al. Combined Al-protection and HF-vapor release process for ultrathin single crystal silicon cantilevers , 2006 .

[2] J. Marohn,et al. Thermomagnetic fluctuations and hysteresis loops of magnetic cantilevers for magnetic resonance force microscopy , 2006, IEEE Transactions on Magnetics.

[3] S. R. Garner,et al. Batch fabrication and characterization of ultrasensitive cantilevers with submicron magnetic tips , 2004 .

[4] B. Chui,et al. Single spin detection by magnetic resonance force microscopy , 2004, Nature.

[5] P. Hammel,et al. Magnetic Resonance Force Microscopy With A Permanent Magnet On The Cantilever , 1997, 1997 IEEE International Magnetics Conference (INTERMAG'97).

[6] J. Sidles,et al. Noninductive detection of single‐proton magnetic resonance , 1991 .

[7] D. Rugar,et al. Mass-loaded cantilevers with suppressed higher-order modes for magnetic resonance force microscopy , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).