Calibration of an interferometric on-machine probing system on an ultra-precision turning machine
暂无分享,去创建一个
Feng Gao | Liam Blunt | Xiangqian Jiang | Duo Li | Zhen Tong | L. Blunt | Z. Tong | Duo Li | F. Gao | X. Jiang
[1] Wei Gao,et al. Surface profile measurement of a sinusoidal grid using an atomic force microscope on a diamond turning machine , 2007 .
[2] Feng Gao,et al. Fast surface measurement using wavelength scanning interferometry with compensation of environmental noise. , 2010, Applied optics.
[3] X. Jiang,et al. Precision surface measurement , 2012, Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences.
[4] Christophe Tournier,et al. In situ non-contact measurements of surface roughness , 2012 .
[5] Xiangqian Jiang,et al. High resolution position measurement from dispersed reference interferometry using template matching. , 2016, Optics express.
[6] Wei Gao,et al. Measurement and compensation of error motions of a diamond turning machine , 2007 .
[7] Xiang Jiang,et al. Miniaturized Optical Measurement Methods for Surface Nanometrology , 2006 .
[8] Anthony Chukwujekwu Okafor,et al. Derivation of machine tool error models and error compensation procedure for three axes vertical machining center using rigid body kinematics , 2000 .
[9] Fengzhou Fang,et al. Manufacturing and measurement of freeform optics , 2013 .
[10] Aun-Neow Poo,et al. Error compensation in machine tools — a review: Part I: geometric, cutting-force induced and fixture-dependent errors , 2000 .
[11] Chana Raksiri,et al. Geometric and force errors compensation in a 3-axis CNC milling machine , 2004 .
[12] Peter J. de Groot,et al. Progress in the specification of optical instruments for the measurement of surface form and texture , 2014 .
[13] Paul Morantz,et al. Ultra-precision: enabling our future , 2012, Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences.
[14] Wu-Le Zhu,et al. Scanning tunneling microscopy-based on-machine measurement for diamond fly cutting of micro-structured surfaces , 2016 .
[15] Robert G. Wilhelm,et al. Task Specific Uncertainty in Coordinate Measurement , 2001 .
[16] Claudiu L Giusca,et al. Calibration of the scales of areal surface topography measuring instruments: part 2. Amplification, linearity and squareness , 2012 .
[17] Robert J. Hocken,et al. Self-Calibration: Reversal, Redundancy, Error Separation, and ‘Absolute Testing’ , 1996 .
[18] Richard K. Leach,et al. Calibration and verification of areal surface texture measuring instruments , 2015 .
[19] Liam Blunt,et al. Advanced Techniques for Assessment Surface Topography: Development of a Basis for 3D Surface Texture Standards "Surfstand" , 2003 .
[20] Tao Sun,et al. Non-contact on-machine measurement using a chromatic confocal probe for an ultra-precision turning machine , 2017 .