Calibration of an interferometric on-machine probing system on an ultra-precision turning machine

Abstract Surface measurement is fundamental to further enhance accuracy and efficiency in ultra-precision machining. Advanced on-machine measurement (OMM) is evolving as the key enabling technology for autonomous and intelligent manufacturing. The present work integrates an interferometric probing system on an ultra-precision turning machine. However, due to relatively harsh environment in the machine tools, metrology characteristics of surface measuring instrument would deviate from those tested in laboratories. In order to improve the performance of on-machine measurement system, it is necessary to calibrate the OMM system and compensate the systematic errors. Three major error sources, including on-machine vibration, machine tool kinematic errors, and linearity errors are investigated according to the characteristics of interferometric single point OMM. For on-machine vibration, a theoretical study of the relationship between sampling frequency, scanning parameters, vibration frequency and topography frequencies of interest is first presented. Static and scanning vibration tests are performed in order to select the proper sampling frequency. Machine scanning error is mapped for OMM correction with the proposed kinematic error modelling measurement and compensation method. Calibration of the response curve and linearity error correction is conducted by measuring a radially distributed step height sample on the machine. Experimental investigation is conducted which proves the validity of proposed calibration methodology and the effectiveness of OMM. After the calibration process, OMM results agree well with calibrated offline measurements.

[1]  Wei Gao,et al.  Surface profile measurement of a sinusoidal grid using an atomic force microscope on a diamond turning machine , 2007 .

[2]  Feng Gao,et al.  Fast surface measurement using wavelength scanning interferometry with compensation of environmental noise. , 2010, Applied optics.

[3]  X. Jiang,et al.  Precision surface measurement , 2012, Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences.

[4]  Christophe Tournier,et al.  In situ non-contact measurements of surface roughness , 2012 .

[5]  Xiangqian Jiang,et al.  High resolution position measurement from dispersed reference interferometry using template matching. , 2016, Optics express.

[6]  Wei Gao,et al.  Measurement and compensation of error motions of a diamond turning machine , 2007 .

[7]  Xiang Jiang,et al.  Miniaturized Optical Measurement Methods for Surface Nanometrology , 2006 .

[8]  Anthony Chukwujekwu Okafor,et al.  Derivation of machine tool error models and error compensation procedure for three axes vertical machining center using rigid body kinematics , 2000 .

[9]  Fengzhou Fang,et al.  Manufacturing and measurement of freeform optics , 2013 .

[10]  Aun-Neow Poo,et al.  Error compensation in machine tools — a review: Part I: geometric, cutting-force induced and fixture-dependent errors , 2000 .

[11]  Chana Raksiri,et al.  Geometric and force errors compensation in a 3-axis CNC milling machine , 2004 .

[12]  Peter J. de Groot,et al.  Progress in the specification of optical instruments for the measurement of surface form and texture , 2014 .

[13]  Paul Morantz,et al.  Ultra-precision: enabling our future , 2012, Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences.

[14]  Wu-Le Zhu,et al.  Scanning tunneling microscopy-based on-machine measurement for diamond fly cutting of micro-structured surfaces , 2016 .

[15]  Robert G. Wilhelm,et al.  Task Specific Uncertainty in Coordinate Measurement , 2001 .

[16]  Claudiu L Giusca,et al.  Calibration of the scales of areal surface topography measuring instruments: part 2. Amplification, linearity and squareness , 2012 .

[17]  Robert J. Hocken,et al.  Self-Calibration: Reversal, Redundancy, Error Separation, and ‘Absolute Testing’ , 1996 .

[18]  Richard K. Leach,et al.  Calibration and verification of areal surface texture measuring instruments , 2015 .

[19]  Liam Blunt,et al.  Advanced Techniques for Assessment Surface Topography: Development of a Basis for 3D Surface Texture Standards "Surfstand" , 2003 .

[20]  Tao Sun,et al.  Non-contact on-machine measurement using a chromatic confocal probe for an ultra-precision turning machine , 2017 .