Heterarchical control of a lithoshop

In Figure 2, a model of the litho area of MOS4YOU is depicted, equipped with a heterarchical control system. The model consists of generator G, reticle agent RA, job agents J , workstations W, transporters T , and communication network N . Reticle agent RA is responsible for reticle handling (a reticle is mask needed for selective exposure on a litho module). Generator G contains an order distributor O, and workstation W contains a workstation agent A. The components O, J, N, A, and RA form the actual control system of the model, and communication between these components takes place through the network. For scheduling a lot, job agent J negotiates with several workstation agents A, and mutual agreement between job agent J and workstation agent A results in a lot being scheduled.