论文信息 - Optical micro encoder with sub-micron resolution using a VCSEL

Optical micro encoder with sub-micron resolution using a VCSEL

Abstract An improved optical micro encoder using a vertical-cavity surface-emitting laser (VCSEL) is presented in this paper. A twin-beam VCSEL is used in order to obtain two quasi-sinusoidal signals in phase quadrature. Directional sensing and signal interpolation have become possible. Also, microlenses are monolithically integrated onto the VCSEL in order to improve resolution. The encoder chip size is approximately 1.5 × 2.0 × 0.6 mm 3 . Displacement measurement is performed using a scale with a pitch of 20 μm, and resolution of 0.1 μm is achieved as a result of signal interpolation. Additionally, the encoder is installed into a low-height linear stage and characterized, demonstrating a possible application. A prototype of the packaged encoder is also presented.

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