Development of linear measuring system

The linear length measurements are most frequently performed and should be most accurate among other parts in dimensional metrology. We developed the linear measuring system using a laser interferometer to improve the accuracy and to shorten the calibration time. The uncertainty of the system is 0.01 .mu. for 500mm steel gage block. The range of the measurement and resolution of the system are 1000mm and 0.01 .mu. m, respectively.