Comparison study of ITO thin films deposited by sputtering at room temperature onto polymer and glass substrates

Indium tin oxide (ITO) thin films have been grown simultaneously onto glass and polymer substrates at room temperature by sputtering from ceramic target. The structure, morphology and electro-optical characteristics of the ITO/glass and ITO/polymer samples have been analyzed by X-ray diffraction, atomic force microscopy, four-point electrical measurements and spectrophotometry. In the selected experimental conditions, the polycrystalline ITO coating shows higher average grain size and higher conductivity, with similar visible transmittance, onto the polymer than onto the glass substrate.

[1]  Elvira Fortunato,et al.  Properties of ITO films deposited by r.f.-PERTE on unheated polymer substrates—dependence on oxygen partial pressure , 2003 .

[2]  F. O. Adurodija,et al.  Electrical and structural properties of indium tin oxide films prepared by pulsed laser deposition , 2002 .

[3]  P. Carcia,et al.  Influence of energetic bombardment on stress, resistivity, and microstructure of indium tin oxide films grown by radio frequency magnetron sputtering on flexible polyester substrates , 2003 .

[4]  S. Park,et al.  Deposition of indium–tin-oxide films on polymer substrates for application in plastic-based flat panel displays , 2001 .

[5]  C. Granqvist,et al.  Transparent and conducting ITO films: new developments and applications , 2002 .

[6]  C. Guillén,et al.  Transparent films on polymers for photovoltaic applications , 2002 .

[7]  Y. Hoshi,et al.  Structure and electrical properties of ITO thin films deposited at high rate by facing target sputtering , 2003 .

[8]  N. Lee,et al.  Effects of oxygen radical on the properties of indium tin oxide thin films deposited at room temperature by oxygen ion beam assisted evaporation , 2000 .

[9]  Susanne Siebentritt,et al.  A stacked chalcopyrite thin‐film tandem solar cell with 1.2 V open‐circuit voltage , 2003 .

[10]  Youngchul Park,et al.  Influence of O2 admixture and sputtering pressure on the properties of ITO thin films deposited on PET substrate using RF reactive magnetron sputtering , 2003 .

[11]  Zakya H. Kafafi,et al.  Indium tin oxide thin films grown on flexible plastic substrates by pulsed-laser deposition for organic light-emitting diodes , 2001 .

[12]  Daeil Kim,et al.  AFM observation of ITO thin films deposited on polycarbonate substrates by sputter type negative metal ion source , 2003 .

[13]  Y. Tak,et al.  Criteria for ITO (indium tin-oxide) thin film as the bottom electrode of an organic light emitting diode , 2002 .