Intrinsic Origin of Electron Mobility Reduction in High-k MOSFETs - From Remote Phonon to Bottom Interface Dipole Scattering
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T. Nabatame | A. Toriumi | S. Migita | H. Ota | N. Yasuda | K. Okada | Y. Watanabe | K. Iwamoto | K. Akiyama | A. Hirano