A hysteresis compensation method of piezoelectric actuator: Model, identification and control

A major deficiency of piezoelectric actuators is that their open-loop control accuracy is seriously limited by hysteresis. In this paper, a novel mathematical model is proposed to describe hysteresis precisely. Based on the hysteresis model, an adaptive inverse control approach is presented for reducing hysteresis. The weights of the main hysteresis loop are identified by using least mean square (LMS) algorithm. The realization of an inverse feedforward controller for the linearization of a piezoelectric actuator is formulated. Experiments were performed on a micro-positioning system driven by piezoelectric actuators. The experimental results demonstrate that the positioning precision is noticeably improved in open-loop operation compared to the conventional open-loop control without any compensation.

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