Development trends in the field of sensors

Sensors play a major role in automation, analysis and monitoring of processes. The use of planar technology (IC-technology or IC-compatible technologies) caused a break-through in the field as it allows the realization of small, highly reliable, and cost-efficient sensor devices. The field of microelectromechanical systems (MEMS) technology has matured in the last decade and at the moment the further miniaturization into the nanoscale range attracts a lot of attention. In this contribution we give an overview on current trends in the field of sensors, where three different sensor fields are discussed in more detail: (bio)chemical sensors, automotive sensors and gas sensors.ZusammenfassungSensoren haben bei der Automatisierung, Analyse und Überwachung von Prozessen eine große Bedeutung. Durch die mögliche Realisierung von kleinen, zuverlässigen und kostengünstigen Sensoren führte die Anwendung der Planartechnologie (IC-Technologie oder IC-kompatible Technologien) zu einem Durchbruch in diesem Gebiet. In den letzten zehn Jahren ist das Gebiet der mikroelektromechanischen Systeme (MEMS) gereift und die Miniaturisierung schreitet weiter in den Nanometerbereich voran. Im vorliegenden Beitrag geben die Autoren einen Überblick über gegenwärtige Entwicklungstrends auf dem Gebiet der Sensorik, wobei drei Bereiche herausgegriffen werden: (bio)chemische Sensoren, Automobilsensorik und Gassensorik.

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