论文信息 - Characterization of multilayer coatings by X-ray reflection

Characterization of multilayer coatings by X-ray reflection

2014 Methods to deduce the parameters of a multilayer X-ray mirror from its reflectivity curve are reviewed. Inversion methods are successful for coatings with few layers and give the thickness of each layer and the roughness of each interface. A statistical description of the coating is used for coatings with many layers, and simple formulas are given to derive the average thickness error and boundary roughness in a multilayer mirror. Revue Phys. Appl. 23 (1988) 1687-1700 OCTOBRE 1988, PAGE

Eberhard Spiller | E. Spiller

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