Microassembly and micropackaging of implantable systems

Abstract: The successful realization of an implantable sensor system for medical applications requires an overview on how individual electronic, electromechanical or mechanical components can be assembled and later packaged in order to allow a long failure-free operation inside the patient. This chapter provides insights into common microassembly methods and electronic packaging methods including hermetic packaging and non-hermetic polymeric encapsulation. The latter particularly requires the implant component technology and assembly methods to be selected very thoroughly in order to reliably protect the electronics from body fluids. Hence, microassembly methods and micropackaging concepts have to match in order to fabricate implants that withstand the harsh bodily environment for years or even decades.

[1]  Nigel H. Lovell,et al.  Chip-scale hermetic feedthroughs for implantable bionics , 2011, 2011 Annual International Conference of the IEEE Engineering in Medicine and Biology Society.

[2]  Nick Donaldson,et al.  Developing a Wafer Level Gold-Polysilicon Eutectic Bond Process to Protect Sensitive Electronic Devices , 2010 .

[3]  W.D. van Driel,et al.  Moisture diffusion model verification of packaging materials , 2008, 2008 International Conference on Electronic Packaging Technology & High Density Packaging.

[4]  Donaldson Nd Low-technology sealing method for implantable hermetic packages. , 1988 .

[5]  N D Donaldson A noble spring-clip: fatigue-resistant electrical connection for implant use. , 1984, Journal of biomedical engineering.

[6]  G. Loeb,et al.  Parylene as a Chronically Stable, Reproducible Microelectrode Insulator , 1977, IEEE Transactions on Biomedical Engineering.

[7]  C. G. Peattie,et al.  Elements of semiconductor-device reliability , 1974 .

[8]  Nick Donaldson,et al.  The permeability of silicone rubber to metal compounds: relevance to implanted devices. , 2012, Journal of biomedical materials research. Part A.

[9]  R. N. Scott,et al.  Epoxy moulding system for the encapsulation of microelectronic devices suitable for implantation , 2006, Medical and Biological Engineering and Computing.

[10]  D. Johnson,et al.  Parallel Gap Welding to Thick-Film Metallization , 1976 .

[11]  Rao Tummala,et al.  High density electrical interconnections in liquid crystal polymer (LCP) substrates for retinal and neural prosthesis applications , 2011, 2011 IEEE 61st Electronic Components and Technology Conference (ECTC).

[12]  M. L. White,et al.  Attaining Low Moisture Levels in Hermetic Packages , 1982, 20th International Reliability Physics Symposium.

[13]  Martin Stelzle,et al.  Biostability of micro-photodiode arrays for subretinal implantation. , 2002, Biomaterials.

[14]  Thomas Stieglitz,et al.  Interconnection technologies for laser-patterned electrode arrays , 2008, 2008 30th Annual International Conference of the IEEE Engineering in Medicine and Biology Society.

[15]  P. E. K. Donaldson,et al.  A vacuum centrifuge for void-free potting of implantable hybrid microcircuits in silicone , 2006, Medical and biological engineering.

[16]  D. Beebe,et al.  Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer , 2000, Journal of Microelectromechanical Systems.

[17]  M. Junk,et al.  A Study of Parylene C Polymer Deposition Inside Microscale Gaps , 2007, IEEE Transactions on Advanced Packaging.

[18]  Thomas Stieglitz,et al.  A Novel Interconnection Technology for Laser-Structured Platinum Silicone Electrode Arrays , 2009 .

[19]  P. E. K. Donaldson,et al.  A technology for implantable hermetic packages. Part 1: Design and materials , 1981, Medical and Biological Engineering and Computing.

[20]  G. Harman,et al.  Wire bonding in microelectronics , 2010 .

[21]  D N Rushton,et al.  A reconnectable multiway implantable connector. , 2002, Medical engineering & physics.

[22]  Hal Greenhouse Hermeticity of electronic packages , 2000 .

[23]  Anne Vanhoestenberghe,et al.  The limits of hermeticity test methods for micropackages. , 2011, Artificial organs.

[24]  Thomas Stieglitz,et al.  Ensuring minimal humidity levels in hermetic implant housings , 2011, 2011 Annual International Conference of the IEEE Engineering in Medicine and Biology Society.

[25]  William J. Chappell,et al.  3D packaging technique on liquid crystal polymer (LCP) for miniature wireless biomedical sensor , 2010, 2010 IEEE MTT-S International Microwave Symposium.

[26]  K. Najafi,et al.  Long-term hermeticity and biological performance of anodically bonded glass-silicon implantable packages , 2005, IEEE Transactions on Device and Materials Reliability.

[27]  Thomas Stieglitz,et al.  Polymer-based shaft microelectrodes with optical and fluidic capabilities as a tool for optogenetics , 2011, 2011 Annual International Conference of the IEEE Engineering in Medicine and Biology Society.

[28]  Seung Woo Lee,et al.  Development of microelectrode arrays for artificial retinal implants using liquid crystal polymers. , 2009, Investigative ophthalmology & visual science.

[29]  J G DAVIES,et al.  Experience with Implanted Pacemakers: Technical Considerations , 1965, Thorax.

[30]  R. Traeger,et al.  Nonhermeticity of Polymeric Lid Sealants , 1977 .

[31]  Peter E. K. Donaldson The Encapsulation of Microelectronic Devices for Long-Term Surgical Implantation , 1976, IEEE Transactions on Biomedical Engineering.

[32]  Daryl R. Kipke,et al.  3-D silicon probe array with hybrid polymer interconnect for chronic cortical recording , 2003, First International IEEE EMBS Conference on Neural Engineering, 2003. Conference Proceedings..

[33]  T. Stieglitz,et al.  CMOS-Based High-Density Silicon Microprobe Array for Electronic Depth Control in Neural Recording , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

[34]  P. Holmes,et al.  Handbook of thick film technology , 1976 .

[35]  F. Solzbacher,et al.  Integrated wireless neural interface based on the Utah electrode array , 2009, Biomedical microdevices.

[36]  K. Otsuka,et al.  Package Sealing and Encapsulation , 1997 .

[37]  T. Stieglitz,et al.  Characterization of parylene C as an encapsulation material for implanted neural prostheses. , 2010, Journal of biomedical materials research. Part B, Applied biomaterials.

[38]  J. Spensley,et al.  STIMuGRIP® a new hand control implant , 2007, 2007 29th Annual International Conference of the IEEE Engineering in Medicine and Biology Society.

[39]  G E Loeb,et al.  BION system for distributed neural prosthetic interfaces. , 2001, Medical engineering & physics.

[40]  J. W. Osenbach Water‐Induced Corrosion of Materials Used for Semiconductor Passivation , 1993 .

[41]  Michael Pecht,et al.  Encapsulation Technologies for Electronic Applications , 2019 .

[42]  F. Solzbacher,et al.  Characterization of a-SiC(x):H thin films as an encapsulation material for integrated silicon based neural interface devices. , 2007, Thin Solid Films.

[43]  Thomas Stieglitz,et al.  Development of a micromachined epiretinal vision prosthesis , 2009, Journal of neural engineering.

[44]  R. W. Vasofsky Water Vapor Sorption of Package Sealants , 1979, 17th International Reliability Physics Symposium.

[45]  D. T. Somerville The Role of Hybrid Construction Techniques on Sealed Moisture Levels , 1977, 15th International Reliability Physics Symposium.

[46]  B Parker,et al.  Pacemaker failures characterized by continuous direct current leakage. , 1976, American Journal of Cardiology.

[47]  P. Donaldson,et al.  The essential role played by adhesion in the technology of neurological prostheses , 1996 .

[48]  C. Richter Cochlear Implants: Fundamentals and Applications , 2004 .

[49]  Gábor Harsányi,et al.  ELECTROCHEMICAL MIGRATION IN THICK-FILM IC-S , 1985 .

[50]  Hermanus J. Hermens,et al.  Encapsulation materials for implantable FES systems - a case study , 2000 .

[51]  O. Paul,et al.  Microprobe Array with Low Impedance Electrodes and Highly Flexible Polyimide Cables for Acute Neural Recording , 2007, 2007 29th Annual International Conference of the IEEE Engineering in Medicine and Biology Society.

[52]  P.E.K. Donaldson Hydrothermal stability of joints, using a silicone rubber adhesive, for a range of adherends of interest to makers of surgically-implanted microelectronic devices , 1994 .

[53]  P. E. K. Donaldson,et al.  Aspects of silicone rubber as an encapsulant for neurological prostheses , 2006, Medical and Biological Engineering and Computing.

[54]  C. Van Hoof,et al.  A 3D slim-base probe array for in vivo recorded neuron activity , 2008, 2008 30th Annual International Conference of the IEEE Engineering in Medicine and Biology Society.

[55]  Khalil Najafi Micropackaging Technologies for Integrated Microsystems: Applications to MEMS and MOEMS , 2003, SPIE MOEMS-MEMS.

[56]  Thomas Stieglitz,et al.  An Optically Powered Single-Channel Stimulation Implant as Test System for Chronic Biocompatibility and Biostability of Miniaturized Retinal Vision Prostheses , 2007, IEEE Transactions on Biomedical Engineering.

[57]  Joseph H. Schulman,et al.  An Implantable Bionic Network of Injectable Neural Prosthetic Devices: The Future Platform for Functional Electrical Stimulation and Sensing to Restore Movement and Sensation , 2007 .

[58]  T. Stieglitz,et al.  High density interconnects and flexible hybrid assemblies for active biomedical implants , 2001 .

[59]  David Daomin Zhou,et al.  Implantable Neural Prostheses 2 , 2010 .

[60]  Wen H. Ko,et al.  Packaging Materials and Techniques for Implantable Instruments , 1983, Engineering in Medicine and Biology Magazine.

[61]  G. Loeb,et al.  Micromodular implants to provide electrical stimulation of paralyzed muscles and limbs , 1997, IEEE Transactions on Biomedical Engineering.

[62]  P. Wynblatt,et al.  Water Adsorption and Surface Conductivity Measurements on alpha -Alumina Substrates , 1987 .

[63]  P. E. K. Donaldson In search of the reliable microelectronic implant , 1978, Trends in Neurosciences.

[64]  Y. Zhou,et al.  Microjoining and Nanojoining , 2008 .

[65]  James Weiland,et al.  In vitro and in vivo evaluation of ultrananocrystalline diamond for coating of implantable retinal microchips. , 2006, Journal of biomedical materials research. Part B, Applied biomaterials.

[66]  Joonsoo Jeong,et al.  Monolithic Encapsulation of Implantable Neuroprosthetic Devices Using Liquid Crystal Polymers , 2011, IEEE Transactions on Biomedical Engineering.

[67]  Paul P Breen,et al.  BION microstimulators: a case study in the engineering of an electronic implantable medical device. , 2011, Medical engineering & physics.

[68]  Thomas Stieglitz,et al.  Multichannel neural cuff electrodes with integrated multiplexer circuit , 2000, 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology. Proceedings (Cat. No.00EX451).

[69]  Anne Vanhoestenberghe,et al.  Realization of an active book for multichannel intrathecal root stimulation in spinal cord injury — Preliminary results , 2011, 2011 Annual International Conference of the IEEE Engineering in Medicine and Biology Society.

[70]  T. Stieglitz,et al.  Laser-fabrication of peripheral nerve cuff electrodes with integrated microfluidic channels , 2011, 2011 5th International IEEE/EMBS Conference on Neural Engineering.

[71]  R. Thomas Moisture, Myths, and Microcircuits , 1976 .

[72]  S. Pourmehdi,et al.  An externally powered, multichannel, implantable stimulator-telemeter for control of paralyzed muscle , 1998, IEEE Transactions on Biomedical Engineering.

[73]  T. Stieglitz,et al.  Reducing stiffness and electrical losses of high channel hybrid nerve cuff electrodes , 2001, 2001 Conference Proceedings of the 23rd Annual International Conference of the IEEE Engineering in Medicine and Biology Society.