Research on the Fuzzy Hybrid PID Controller and its Application in the Initial Levitation Control of Micromachined Electrostatically Suspended Gyroscope

Aiming at the nonlinear characteristic of the levitation control for MESG,the paper presents fuzzy hybrid PID control to levitation control system based on the mathematical model,when the rotor moves far away from null position,fuzzy control is applied to improve the system's rapidity while applying PID control to erase the steady-state error to improve the system's steady characteristic when the rotor moves near the null position.The experimental results demonstrate that,with fuzzy hybrid PID control,the overshoot is reduced to 20% compared with 27% of conventional PID control.The setting time is 25ms,which shows good dynamic performance and global stability.