Structuring with excimer lasers—experimental and theoretical investigations on quality and efficiency

Manufacturing with excimer lasers is becoming an established technology in microstructuring, drilling, and laser vapor deposition. In this article an overview of the work will be given that was recently performed at the IFSW on excimer laser ablation concerning the quality and the efficiency of the ablation process. In a first part the setup used for the ablation experiments is presented. A beam homogenizer developed at IFSW is explained in more detail. The development of this device was initiated by the need for high beam quality along the whole propagation path. Results with modelings including three-dimensional heat conduction and multiple reflections of the incident beam at the hole walls will be compared with experimental findings. It will be shown that multiple reflections are responsible for the inhomogeneity of the bottom structure and can explain the quality of the ablated structure. Additionally, a few two- and three-dimensional structures obtained by using the presented setup and different work...

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