Fabrication of single-mode ridge SU-8 waveguides based on inductively coupled plasma etching

[1]  B. Wang,et al.  Optical amplification in Er/Yb silicate strip loaded waveguide , 2011 .

[2]  Fabrication of monomode channel waveguides in photosensitive polymer on optical adhesive , 2011 .

[3]  Fei Wang,et al.  UV Curable Electro-Optic Polymer Switch Based on Direct Photodefinition Technique , 2011, IEEE Journal of Quantum Electronics.

[4]  Brian A. Telek,et al.  DNA biopolymer conductive cladding for polymer electro-optic waveguide modulators , 2011 .

[5]  R. Stark,et al.  Surface hydrophilization of SU‐8 by plasma and wet chemical processes , 2010 .

[6]  S. H. Lee,et al.  Comparison of dry etching of PMMA and polycarbonate in diffusion pump-based O2 capacitively coupled plasma and inductively coupled plasma , 2010 .

[7]  Stefan F. Preble,et al.  10 Gb/s broadband silicon electro-optic absorption modulator , 2010 .

[8]  Min-Cheol Oh,et al.  Polymer Waveguide Label-Free Biosensors With Enhanced Sensitivity by Incorporating Low-Refractive-Index Polymers , 2010, IEEE Journal of Selected Topics in Quantum Electronics.

[9]  K. Chiang,et al.  Long-period waveguide grating filter based on long-range surface plasmon mode of buried metal stripe , 2010, OECC 2010 Technical Digest.

[10]  Xiaoqiang Sun,et al.  Ultra-Long Compact Optical Polymeric Array Waveguide True-Time-Delay Line Devices , 2010, IEEE Journal of Quantum Electronics.

[11]  D. Yoon,et al.  Surface Etching Properties of a Thermally Curable Polymer Based on Fluorinated Polyether for Polymer Waveguide Biosensor Applications , 2009 .

[12]  C. Chung,et al.  Effects of rf-bias power on plasma parameters in a low gas pressure inductively coupled plasma , 2009 .

[13]  Christopher T. DeRose,et al.  Hybrid electro-optic polymer/sol-gel waveguide directional coupler switches , 2009 .

[14]  Sailing He,et al.  Fabrication and Characterization of Small Optical Ridge Waveguides Based on SU-8 Polymer , 2009, Journal of Lightwave Technology.

[15]  Wei-Chih Wang,et al.  Large-core single-mode rib SU8 waveguide using solvent-assisted microcontact molding. , 2008, Applied optics.

[16]  Robert A Norwood,et al.  Transversely tapered hybrid electro-optic polymer/sol-gel Mach–Zehnder waveguide modulators , 2008 .

[17]  Joon-Hee Kim,et al.  The effect of inductively coupled plasma treatment on the surface activation of polycarbonate substrate , 2008 .

[18]  C. Liu,et al.  Recent Developments in Polymer MEMS , 2007 .

[19]  Soumyo Mukherji,et al.  A novel dry method for surface modification of SU-8 for immobilization of biomolecules in Bio-MEMS. , 2007, Biosensors & bioelectronics.

[20]  A. Kocabas,et al.  Polymeric waveguide Bragg grating filter using soft lithography. , 2006, Optics express.

[21]  Shoude Chang,et al.  Directly writing of 1-to-N optical waveguide power splitters in fused silica glass using a femtosecond laser , 2005 .

[22]  R.H. Trimm,et al.  Fabrication of low-loss optical-quality polymer waveguide facets in multilayer polymer devices using an inductively coupled plasma , 2005, Journal of Lightwave Technology.

[23]  S. Chen,et al.  Self-formation of GaN hollow nanocolumns by inductively coupled plasma etching , 2005, 5th IEEE Conference on Nanotechnology, 2005..

[24]  Edwin Yue-Bun Pun,et al.  Polymeric optical waveguides using direct ultraviolet photolithography process , 2005 .

[25]  Y. Zhao,et al.  Study of reactive ion etching process to fabricate the PMMA-based polymer waveguide , 2004, Microelectron. J..

[26]  Reactive ion etching of organic polymers for application in waveguide trench molds , 2004 .

[27]  Y. Aoyagi,et al.  Dry-etching method for fabricating photonic-crystal waveguides in nonlinear-optical polymers , 2003 .

[28]  H. Fetterman,et al.  Low-loss interconnection between electrooptic and passive polymer waveguides with a vertical taper , 2002, IEEE Photonics Technology Letters.

[29]  Richard J. Farris,et al.  The characterization of thermal and elastic constants for an epoxy photoresist SU8 coating , 2002 .

[30]  Larry R. Dalton,et al.  Polymer-based optical waveguides: Materials, processing, and devices , 2002 .

[31]  Shom Ponoth,et al.  Optimized oxygen plasma etching of polyimide films for low loss optical waveguides , 2002 .

[32]  Min-Cheol Oh,et al.  Recent advances in electrooptic polymer modulators incorporating highly nonlinear chromophore , 2001 .

[33]  Jae-Wook Kang,et al.  Optimized Oxygen Plasma Etching of Polycarbonate for Low-Loss Optical Waveguide Fabrication , 2001 .

[34]  W. Jang,et al.  Evaluation of halogenated polyimide etching for optical waveguide fabrication by using inductively coupled plasma , 2001 .