论文信息 - Stability of As and B doped Si with respect to overlaying CoSi_2 and TiSi_2 thin films - 字舞流文

Stability of As and B doped Si with respect to overlaying CoSi_2 and TiSi_2 thin films

K. Maex | L. V. Hove | R. D. Keersmaecker | G. Ghosh | L. Delaey | P. Lippens | V. Probst | L. V. den hove | R. D. De Keersmaecker