CameraMan: A multirobot system for nanohandling in a scanning electron microscope

This paper presents the detailed design of a nanohandling robot cell that can work inside an SEM's vacuum chamber and incorporates miniature video microscopes in order to enable fully automated nanohandling and -assembly. The geometrical and mechanical requirements are defined and addressed in a modular implementation. Image processing techniques can be used to recognize and track objects and three dimensional information can be obtained by stereo vision as well as the microscope's focus. To control this highly heterogeneous system, different low-level controllers are used, challenges for cooperatively controlling the multi-robot system are outlined, and high-level automation is discussed.

[1]  Alois Knoll,et al.  Fully Automatic Real-Time 3D Object Tracking using Active Contour and Appearance Models , 2006, J. Multim..

[2]  Sergej Fatikow,et al.  Visual servoing of a mobile microrobot inside a scanning electron microscope , 2005, 2005 IEEE/RSJ International Conference on Intelligent Robots and Systems.

[3]  Eric Krotkov,et al.  Focusing , 2004, International Journal of Computer Vision.

[4]  Shree K. Nayar,et al.  Shape from Focus , 1994, IEEE Trans. Pattern Anal. Mach. Intell..

[5]  Oliver Schreer.  Stereoanalyse und Bildsynthese , 2007 .

[6]  R. Bajcsy.  Active perception , 1988 .

[7]  Frank P. Ferrie,et al.  Active Object Recognition: Looking for Differences , 2001, International Journal of Computer Vision.

[8]  Sergej Fatikow,et al.  Automatic control system of a microrobot-based microassembly station using computer vision , 1999, Optics East.

[9]  Yiannis Aloimonos,et al.  Active vision , 2004, International Journal of Computer Vision.

[10]  Sven J. Dickinson,et al.  Qualitative tracking of 3-D objects using active contour networks , 1994, 1994 Proceedings of IEEE Conference on Computer Vision and Pattern Recognition.

[11]  Sergej Fatikow,et al.  Real-time object tracking for the robot-based nanohandling in a scanning electron microscope , 2006 .

[12]  Larry H. Matthies,et al.  Kalman filter-based algorithms for estimating depth from image sequences , 1989, International Journal of Computer Vision.

[13]  Subhashis Banerjee,et al.  Active recognition through next view planning: a survey , 2004, Pattern Recognit..