论文信息 - Monte-Carlo analysis of measurement uncertainties for on-wafer thru-reflect-line calibrations

Monte-Carlo analysis of measurement uncertainties for on-wafer thru-reflect-line calibrations

Although on-wafer high-frequency measurements are nowadays commonly used, uncertainties for scattering-parameter measurements in planar transmission lines are still not yet established - a problem which has been long solved in coaxial lines and waveguides. We describe a GUM-compliant approach that is capable of providing a traceability path for on-wafer measurements up to 50 GHz using the TRL calibration algorithm.

U. Arz | J. Leinhos

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