论文信息 - Digital Silicon Photonic MEMS Phase-Shifter

Digital Silicon Photonic MEMS Phase-Shifter

We report on a 4-bit digital silicon photonic MEMS phase-shifter with sub-microsecond switching time and low power consumption $(< \mathbf{10\ uW})$. The device consists of 4 digitally switched phase-shifting units, which in total enable phase shift from pi/8 to 15pi/8 in increments of pi/8.

[1] Jia-Min Shieh,et al. Optical phase modulators using deformable waveguides actuated by micro-electro-mechanical systems. , 2011, Optics letters.

[2] David J. Thomson,et al. Silicon optical modulators , 2010 .

[3] Kazuhiro Hane,et al. Phase-shifter using submicron silicon waveguide couplers with ultra-small electro-mechanical actuator. , 2010, Optics express.

[4] Ming C. Wu,et al. Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers , 2016 .

[5] Analog Silicon Photonic MEMS phase-shifter with double-step electrostatic actuation , 2017, 2017 International Conference on Optical MEMS and Nanophotonics (OMN).

[6] Jens H. Schmid,et al. Roadmap on silicon photonics , 2016 .