Silicon nanophotonics using deep-UV lithography

We will present recent progress in several devices based on silicon-on-insulator nanophotonics using deep-UV lithography. We will report on high efficiency grating couplers, ultra-compact arrayed waveguide gratings and ring-resonator based biosensors.

[1]  D. Van Thourhout,et al.  Silicon-on-insulator platform for integrated wavelength-selective components , 2005, Proceedings of 2005 IEEE/LEOS Workshop on Fibres and Optical Passive Components, 2005..

[2]  G. Roelkens,et al.  Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography , 2005, IEEE Photonics Technology Letters.

[3]  Roel Baets,et al.  Optical modelling of photonic crystals and VCSELs using eigenmode expansion and perfectly matched layers , 2001 .

[5]  T. Shoji,et al.  Microphotonics devices based on silicon microfabrication technology , 2005, IEEE Journal of Selected Topics in Quantum Electronics.