Fabrication of Micro/nano Structures Using Mechanical Scratching Method with AFM Tip

To study novel methods for fabricating micro/nano and MEMS/NENS structure on the nanometer scale, based on AFM reconstructed system, mechanical scratching mechanism with an AFM tip, effects of positioning accuracy, AFM modes and tip geometry are investigated. Complex Chinese Character “哈工大” are fabricated and treated as an example to explain how to obtain coordinates of the structure. Simultaneously, a gear shape and two-dimensional structures are machined. Results show that AFM-based mechanical scratching technique can be applied in the fields of fabrication of micro/nano structures.