Highly Reliable Silicon 1%41cro-machined Physical Sensors In Mass Production
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Silicon micro-machined physical sensors such as silicon pressure sensors and accelerometers, are now in mass production respondin): to the strong market demands. In design of such sensors, the most important thmg to be considered is to guarantee high reliability as well as to produce with inexpensive cost. To respond to these demands for the micro sensors, the designs of device structure, production processes, and packaging have been investigated in detail.