论文信息 - Deposition of Thin SiOx Films by Direct Precursor Injection in Atmospheric Pressure Microwave Torch (TIA) - 字舞流文

Deposition of Thin SiOx Films by Direct Precursor Injection in Atmospheric Pressure Microwave Torch (TIA)

P. Tristant | C. Dublanche-Tixier | S. S. Asad | J. P. Lavoute | C. Jaoul | C. Chazelas | C. Boisse-Laporte