Low-frequency and ultra-wideband MEMS electrostatic vibration energy harvester powering an autonomous wireless temperature sensor node

We report a 1-cm2 ultra-wideband MEMS electrostatic vibration energy harvester (e-VEH) that combines a frequency-up conversion system with a vertical electret layer obtained by corona discharge. At 2.0 grms, the device can harvest more than 1 μW from 59 to 148 Hz, and more than 0.5 μW from 14 to 152 Hz. Thanks to this new device, we demonstrate the self-starting power supply of an energy autonomous temperature sensor node with a data transmission beyond a distance of 10 m at 868 MHz.

[1]  T.C. Green,et al.  Architectures for vibration-driven micropower generators , 2004, Journal of Microelectromechanical Systems.

[2]  Timothy C. Green,et al.  Energy Harvesting From Human and Machine Motion for Wireless Electronic Devices , 2008, Proceedings of the IEEE.

[3]  Daigo Miki,et al.  A MEMS electret generator with electrostatic levitation for vibration-driven energy-harvesting applications , 2010 .

[4]  Nobuhide Kasagi,et al.  Large-amplitude MEMS electret generator with nonlinear spring , 2010, 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).

[5]  Chengkuo Lee,et al.  Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output Power , 2011, Journal of Microelectromechanical Systems.

[6]  T. Galchev,et al.  A Piezoelectric Parametric Frequency Increased Generator for Harvesting Low-Frequency Vibrations , 2012, Journal of Microelectromechanical Systems.

[7]  Einar Halvorsen,et al.  Wide tuning-range resonant-frequency control by combining electromechanical softening and hardening springs , 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

[8]  Elena Blokhina,et al.  Electrostatic vibration energy harvester with combined effect of electrical nonlinearities and mechanical impact , 2014 .

[9]  P. Basset,et al.  Electrostatic generator with free micro-ball and elastic stoppers for low-frequency vibration harvesting , 2014, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS).

[10]  Ruochen Lu,et al.  A non-resonant, gravity-induced micro triboelectric harvester to collect kinetic energy from low-frequency jiggling movements of human limbs , 2014 .

[11]  Seiji Aoyagi,et al.  Vertical capacitive energy harvester positively using contact between proof mass and electret plate - Stiffness matching by spring support of plate and stiction prevention by stopper mechanism , 2015, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).

[12]  Sébastien Boisseau,et al.  Low-Frequency MEMS Electrostatic Vibration Energy Harvester With Corona-Charged Vertical Electrets and Nonlinear Stoppers , 2015 .

[13]  J. Xie,et al.  Electrostatic charge sensor based on a micromachined resonator with dual micro-levers , 2015 .