Twin-Probe Vibroscanning Method for Dimensional Measurement of Microholes

Abstract We present a new twin-probe vibroscanning method for measuring the inside profile of microholes in electrically nonconductive materials. Instead of the single cantilever probe used in the conventional vibroscanning method, a probe with two elements in electrical contact is used to detect the surface. Following a feasibility test with a macroscale prototype device, the measurement of microholes was realized using a silicon-based microprobe.