MOVING-MAGNET PLANAR ACTUATOR WITH INTEGRATED ACTIVE MAGNETIC BEARING

INTRODUCTION In recent years, magnetically levitated planar actuators have been developed for demanding applications such as wafer stages. Although the translator of these actuators can move over relatively large distances in the xy-plane only, it has to be controlled in six degrees-of-freedom (DOF) because of the active magnetic bearing. These actuators have either moving magnets and stationary coils [1] [2] or moving coils and stationary magnets [3]. The coils in the actuator are simultaneously used for the propulsion in the xy-plane as well as for the 4-DOF active magnetic bearing.

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