论文信息 - Fabrication of Bi2Sr2CaCu2Ox High Tc Superconducting Film with H2O Assisted Metalorganic Chemical Vapor Deposition

Fabrication of Bi2Sr2CaCu2Ox High Tc Superconducting Film with H2O Assisted Metalorganic Chemical Vapor Deposition

With the objective of the deposition of Bi2Sr2CaCu2Ox (BSCCO(2212)) films at low temperature, the metalorganic chemical vapor deposition (MOCVD) has been carried out and c-axis oriented BSCCO(2212) films on MgO(001) substrates were obtained at 550°C and 600°C. When water vapor was added into the reactor, the crystallization of deposited films changed in relation to the partial pressure of water vapor. The more H2O was supplied, the less BSCCO(2212) crystal tended to be formed at 600°C, and the opposite tendency was found at 550°C.

M. Satoh | T. Nishikawa | Takuo Sugano Takuo Sugano | Kunio Asada Kunio Asada

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