Hydrothermal-method-grown ZnO single crystal as fast EUV scintillator for future lithography
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K. Mima | M. Nishikino | D. Ehrentraut | Y. Kagamitani | T. Fukuda | Toshihiko Shimizu | N. Sarukura | H. Murakami | H. Nishimura | K. Nagashima | Momoko Tanaka | Toyoaki Kimura | T. Nakazato | T. Tatsumi | Y. Furukawa | H. Yamatani | S. Saito | T. Kimura