论文信息 - A new PBIID processing system supplying RF and HV pulses through a single feed-through - 字舞流文

A new PBIID processing system supplying RF and HV pulses through a single feed-through

A. Chayahara | Y. Horino | M. Yatsuzuka | Y. Nishimura

[1] J. R. Conrad,et al. Plasma source ion-implantation technique for surface modification of materials , 1987 .

[2] S. T. Picraux,et al. Repetitively pulsed metal ion beams for ion implantation , 1984 .