Polyimide-planarized vertical-cavity surface-emitting lasers with 17.0-GHz bandwidth

High-speed oxide-confined polyimide-planarized 850-nm vertical-cavity surface-emitting lasers exhibit -3-dB modulation bandwidths up to 17.0 GHz. The devices are fabricated using a reproducible, simple process incorporating polyimide with good adhesion that does not require implantation or semiinsulating substrates to achieve low capacitance.