Fundamentals of semiconductor gas sensors

Abstract: As an introduction to this book, a variety of semiconductor gas sensors is presented. They are classified into five types, according to the transducers used: resistor, diode, MIS (metal-insulator-semiconductor) capacitor, MIS FET (metal-insulator-semiconductor field effect transistor) and oxygen concentration cell. The structure, working principle and sensing mechanism are described for each type. As the only type successfully on the market at present, the resistor is allotted considerably more space than the alternative semiconductor gas sensors, with experimental knowledge and the theory of gas response described in detail. The receptor function of metal oxides recently found in resistors is also of critical importance in other types incorporating the same oxides; the contact potential generated between oxide and metal is likely a main origin of the gas response of those devices. Finally, observations on the prospects for and problems with semiconductor gas sensors are made.

[1]  A. Rothschild,et al.  On the Relationship Between the Grain Size and Gas-Sensitivity of Chemo-Resistive Metal-Oxide Gas Sensors with Nanosized Grains , 2004 .

[2]  M. Madou,et al.  Chemical Sensing With Solid State Devices , 1989 .

[3]  Kengo Shimanoe,et al.  Theoretical approach to the gas response of oxide semiconductor film devices under control of gas diffusion and reaction effects , 2011 .

[4]  Kengo Shimanoe,et al.  Receptor function of small semiconductor crystals with clean and electron-traps dispersed surfaces , 2009 .

[5]  T. Seiyama,et al.  A New Detector for Gaseous Components Using Semiconductive Thin Films. , 1962 .

[6]  Ingemar Lundström,et al.  A hydrogen−sensitive MOS field−effect transistor , 1975 .

[7]  P. K. Clifford,et al.  Characteristics of semiconductor gas sensors I. Steady state gas response , 1982 .

[8]  Kengo Shimanoe,et al.  Theory of gas-diffusion controlled sensitivity for thin film semiconductor gas sensor , 2001 .

[9]  J. Watson,et al.  The tin oxide gas sensor and its applications , 1984 .

[10]  N. Yamazoe,et al.  A new capacitive-type NO2 gas sensor combining an MIS with a solid electrolyte , 2005 .

[11]  N. Yamazoe,et al.  Field effect transistor type NO2 sensor combined with NaNO2 auxiliary phase , 2001 .

[12]  Yigal Komem,et al.  The effect of grain size on the sensitivity of nanocrystalline metal-oxide gas sensors , 2004 .

[13]  Kengo Shimanoe,et al.  Contribution of electron tunneling transport in semiconductor gas sensor , 2007 .

[14]  N. Yamazoe,et al.  Explicit formulation for the response of neat oxide semiconductor gas sensor to reducing gas , 2011 .

[15]  N. Mizuno,et al.  La2O3-loaded SnO2 Element as a CO2 Gas Sensor , 1991 .

[16]  Kenji Yokoyama,et al.  Application of microbiological sensors in fermentation processes , 1988 .

[17]  Kengo Shimanoe,et al.  Roles of Shape and Size of Component Crystals in Semiconductor Gas Sensors I. Response to Oxygen , 2008 .

[18]  Kengo Shimanoe,et al.  Roles of Shape and Size of Component Crystals in Semiconductor Gas Sensors , 2008 .

[19]  N. Yamazoe,et al.  Sensing characteristics of ISFET-based hydrogen sensor using proton-conductive thick film , 1995 .

[20]  N. Yamazoe,et al.  Mixed Potential Hydrogen Sensor Combining Oxide Ion Conductor with Oxide Electrode , 1996 .

[21]  N. Yamazoe,et al.  Development of FET-type CO2 sensor operative at room temperature , 2004 .

[22]  Chao-Nan Xu,et al.  Grain size effects on gas sensitivity of porous SnO2-based elements , 1991 .

[23]  Kengo Shimanoe,et al.  Theoretical approach to the rate of response of semiconductor gas sensor , 2010 .