Inductively coupled plasma etching to fabricate sensing window for polymer waveguide biosensor application
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Jian Sun | Xiaoqiang Sun | Chuan-Tao Zheng | Daming Zhang | Changming Chen | Jian Sun | Xibin Wang | Xiaoqiang Sun | Daming Zhang | C. Zheng | Changming Chen | Jie Meng | Xibin Wang | Tianfu Yang | Jie Meng | Tianfu Yang | Da-ming Zhang | Xi-bin Wang | Chuantao Zheng | Tianfu Yang
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