Inductively coupled plasma etching to fabricate sensing window for polymer waveguide biosensor application

[1]  Sailing He,et al.  Compact Arrayed Waveguide Grating Devices Based on Small SU-8 Strip Waveguides , 2011, Journal of Lightwave Technology.

[2]  Fei Wang,et al.  UV Curable Electro-Optic Polymer Switch Based on Direct Photodefinition Technique , 2011, IEEE Journal of Quantum Electronics.

[3]  I K Lao,et al.  Polymer waveguide sensor for early diagnostic and wellness monitoring. , 2011, Biosensors & bioelectronics.

[4]  S. Haxha,et al.  Design and optimization of a novel surface plasmon resonance biosensor based on Otto configuration. , 2009, Optics express.

[5]  Xiaoqiang Sun,et al.  Low switching power 2 × 2 thermo-optic switch using direct ultraviolet photolithography process , 2009 .

[6]  F. Poncin‐Epaillard,et al.  Integrated SU-8 photonic gas sensors based on PANI polymer devices: Comparison between metrological parameters , 2009 .

[7]  Yiming Zhang,et al.  Wafer level bulk titanium ICP etching using SU8 as an etching mask , 2009 .

[8]  Geun-Sik Son,et al.  The fabrication of polymer-based evanescent optical waveguide for biosensing , 2009 .

[9]  Y. Zohar,et al.  Evanescent-Wave Spectroscopy Using an SU-8 Waveguide for Rapid Quantitative Detection of Biomolecules , 2008, Journal of Microelectromechanical Systems.

[10]  S. Shikata,et al.  ICP etching of polycrystalline diamonds: Fabrication of diamond nano-tips for AFM cantilevers , 2008 .

[11]  Xu Guang Huang,et al.  Fresnel-reflection-based fiber sensor for on-line measurement of solute concentration in solutions , 2007 .

[12]  N. Grossard,et al.  Single-mode rib optical waveguides on SOG/SU-8 polymer and integrated Mach-Zehnder for designing thermal sensors , 2006, IEEE Sensors Journal.

[13]  Yu-Chung Huang,et al.  UV-LIGA interferometer biosensor based on the SU-8 optical waveguide , 2005 .

[14]  R.H. Trimm,et al.  Fabrication of low-loss optical-quality polymer waveguide facets in multilayer polymer devices using an inductively coupled plasma , 2005, Journal of Lightwave Technology.

[15]  Y. Zhao,et al.  Study of reactive ion etching process to fabricate the PMMA-based polymer waveguide , 2004, Microelectron. J..

[16]  Chunsheng Yang,et al.  Deep reactive ion etching of PMMA , 2004 .

[17]  Y. Aoyagi,et al.  Dry-etching method for fabricating photonic-crystal waveguides in nonlinear-optical polymers , 2003 .

[18]  Naoki Matsuda,et al.  A design for improving the sensitivity of a Mach–Zehnder interferometer to chemical and biological measurands , 2002 .

[19]  James S. Wilkinson,et al.  Integrated optical Mach-Zehnder biosensor , 1998 .