MeV Energy $\hbox{N}^{+}$-Implanted Planar Optical Waveguides in Er-Doped Tungsten-Tellurite Glass Operating at 1.55 $\mu\hbox{m}$

We report on the fabrication and characterization of planar waveguides in an Er-doped tungsten-tellurite glass by implantation of 3.5 MeV N<sup>+</sup> ions. Implantations were carried out in a wide fluence range of 1·10<sup>16</sup> ÷8 ·10<sup>16</sup> ions/cm<sup>2</sup>. Waveguides were characterized by m-line spectroscopy and spectroscopic ellipsometry. Irradiation-induced refractive index modulation saturated around a fluence of 8 ·10<sup>16</sup> ions/cm<sup>2</sup>. Waveguides operating at 1550 nm were obtained in that material using 3.5 MeV N<sup>+</sup> ion implantation.

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