论文信息 - A MEMS-BASED SPIRAL PIEZOELECTRIC ENERGY HARVESTER

A MEMS-BASED SPIRAL PIEZOELECTRIC ENERGY HARVESTER

A spiral piezoelectric energy harvester (SPEH) suited for micro-fabrication and sensitive to in- plane vibrations is proposed in this paper. A mode 31 coupling is realized with the electrode configuration functioning for both poling and transduction. With the moment caused by large proof mass considered, the intrinsic characteristics of the SPEH were explored by FEM simulations. Then the output power is evaluated at several tens of micro-watts with an acceleration of 5g by use of a simplified analytical model. It is found the output power depends on frequency and direction of the external force as well as the resistance load.

Tao Dong | Zhaochu Yang | Einar Halvorsen

[1] Sang-Gook Kim,et al. Energy harvesting MEMS device based on thin film piezoelectric cantilevers , 2006 .

[2] D. Inman,et al. A Review of Power Harvesting from Vibration using Piezoelectric Materials , 2004 .

[3] Jiashi Yang,et al. A low frequency piezoelectric power harvester using a spiral-shaped bimorph , 2006 .

[4] A. Safari,et al. HIGH-DISPLACEMENT SPIRAL PIEZOELECTRIC ACTUATORS , 1999 .

[5] A. Safari,et al. Theoretical and numerical predictions of the electromechanical behavior of spiral-shaped lead zirconate titanate (PZT) actuators , 2002, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[6] Jiashi Yang,et al. A low frequency piezoelectric power harvester using a spiral-shaped bimorph , 2006 .