From phononic crystals to SAW devices

We investigate the possibility of obtaining phononic crystals using materials commonly employed in device micro fabrication. This study gathers the latest research on micro-phononic crystals, design techniques, material considerations, micro fabrication processes, characterization methods and reported devices. Particularly, the advantages of these crystals in the SAW device structures and their micro fabrication processes are highlighted. We focus our attention on the theoretical method of wave propagations in twodimensional phononic crystals made of cylindrical holes drilled in an active piezoelectric matrix. The first numerical results for the simulation of propagation of acoustic waves in a SAW device with phononic crystals are obtained by our work group. The present work provides evidence that these phononic crystals can be used in micro devices and increase the performance of SAW devices.

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