Micro-chip initiator realized by integrating Al/CuO multilayer nanothermite on polymeric membrane

We have developed a new nanothermite based polymeric electro-thermal initiator for non-contact ignition of a propellant. A reactive Al/CuO multilayer nanothermite resides on a 100 µm thick SU-8/PET (polyethyleneterephtalate) membrane to insulate the reactive layer from the silicon bulk substrate. When current is supplied to the initiator, the chemical reaction Al+CuO occurs and sparkles are spread to a distance of several millimeters. A micro-manufacturing process for fabricating the initiator is presented and the electrical behaviors of the ignition elements are also investigated. The characteristics of the initiator made on a 100 µm thick SU-8/PET membrane were compared to two bulk electro-thermal initiators: one on a silicon and one on a Pyrex substrate. The PET devices give 100% of Al/CuO ignition success for an electrical current >250 mA. Glass based reactive initiators give 100% of Al/CuO ignition success for an electrical current >500 mA. Reactive initiators directly on silicon cannot initiate even with a 4 A current. At low currents (<1 A), the initiation time is two orders of magnitude longer for Pyrex initiator compared to those obtained for PET initiator technology. We also observed that, the Al/CuO thermite film on PET membrane reacts within 1 ms (sparkles duration) whereas it reacts within 4 ms on Pyrex. The thermite reaction is 40 times greater in intensity using the PET substrate in comparison to Pyrex.

[1]  P. Vashishta,et al.  Nanoscale energetic materials , 2010 .

[2]  E. Başaran,et al.  The preparation of copper(II) oxide thin films and the study of their microstructures and optical properties , 2004 .

[3]  Timothy P. Weihs,et al.  Modeling and characterizing the propagation velocity of exothermic reactions in multilayer foils , 1997 .

[4]  S. Bergbreiter,et al.  The First Launch of an Autonomous Thrust-Driven Microrobot Using Nanoporous Energetic Silicon , 2012, Journal of Microelectromechanical Systems.

[5]  Y. Chabal,et al.  Multilayered Al/CuO thermite formation by reactive magnetron sputtering: Nano versus micro , 2010 .

[6]  Carole Rossi,et al.  High‐Energy Al/CuO Nanocomposites Obtained by DNA‐Directed Assembly , 2012 .

[7]  Carole Rossi,et al.  Pyrotechnic actuator: a new generation of Si integrated actuator , 1999 .

[8]  Nam-Trung Nguyen,et al.  SU‐8 as a structural material for labs‐on‐chips and microelectromechanical systems , 2007, Electrophoresis.

[9]  C. Escriba,et al.  On chip magnetic actuator for batch-mode dynamic manipulation of magnetic particles in compact lab-on-chip , 2011 .

[10]  T. P. Weihs,et al.  Deposition and characterization of a self-propagating CuOx/Al thermite reaction in a multilayer foil geometry , 2003 .

[11]  Wayne M. Trott,et al.  Semiconductor bridge: A plasma generator for the ignition of explosives , 1987 .

[12]  L. Currano,et al.  Energetic Nanoporous Silicon Devices , 2009, Journal of Microelectromechanical Systems.

[13]  Carole Rossi,et al.  Design, fabrication and modeling of solid propellant microrocket-application to micropropulsion , 2002 .

[14]  R. J. Jouet,et al.  Influence of Aluminum Passivation on the Reaction Mechanism: Flame Propagation Studies , 2009 .

[15]  Carole Rossi,et al.  Micropyrotechnics, a new technology for making energetic microsystems : review and prospective , 2005 .

[16]  Carole Rossi,et al.  Smart drug delivery injector microsystem based on pyrotechnical actuation , 2003, SPIE Microtechnologies.

[17]  R. Yetter,et al.  Electrostatically self-assembled nanocomposite reactive microspheres. , 2009, ACS applied materials & interfaces.

[18]  Masayoshi Esashi,et al.  Test of B/Ti multilayer reactive igniters for a micro solid rocket array thruster☆ , 2008 .

[19]  Keshab Gangopadhyay,et al.  Characterization of Nanothermite Material for Solid-Fuel Microthruster Applications , 2009 .

[20]  Xavier Dollat,et al.  Integration of a MEMS based safe arm and fire device , 2010 .

[21]  Christopher J. Morris,et al.  Silicon-based bridge wire micro-chip initiators for bismuth oxide–aluminum nanothermite , 2011 .

[22]  Daniel Esteve,et al.  Development of MEMS based safe electro-thermal pyrotechnic igniter for a new generation of microfuze (Invited Paper) , 2005, SPIE Microtechnologies.

[23]  Zhen Chen,et al.  An equation of state for the detonation product of copper oxide/aluminum nanothermite composites , 2010 .

[24]  E. Dreizin,et al.  Nanocomposite thermite powders prepared by cryomilling , 2009 .

[25]  R. Mohan,et al.  Transient pressure mediated intranuclear delivery of FITC-Dextran into chicken cardiomyocytes by MEMS-based nanothermite reaction actuator , 2012 .

[26]  E. Dreizin,et al.  Metal-based reactive nanomaterials , 2009 .

[27]  Deepak Kapoor,et al.  Generation of fast propagating combustion and shock waves with copper oxide/aluminum nanothermite composites , 2007 .

[28]  Pierre Temple-Boyer,et al.  Realization and performance of thin SiO2/SiNx membrane for microheater applications , 1998 .

[29]  Kaili Zhang,et al.  Nanoenergetic Materials for MEMS: A Review , 2007, Journal of Microelectromechanical Systems.

[30]  C. Escriba,et al.  Development of a flexible microfluidic system integrating magnetic micro-actuators for trapping biological species , 2009 .

[31]  Y. Chabal,et al.  Interfacial chemistry in Al/CuO reactive nanomaterial and its role in exothermic reaction. , 2013, ACS applied materials & interfaces.

[32]  Georges Delhomme,et al.  Oxidized porous silicon: a new approach in support thermal isolation of thermopile-based biosensors , 1998 .

[33]  R. Yetter,et al.  Effects of fuel and oxidizer particle dimensions on the propagation of aluminum containing thermites , 2011 .

[34]  V. Lysenko,et al.  Study of Nano-Porous Silicon with Low Thermal Conductivity as Thermal Insulating Material , 2000 .

[35]  Carole Rossi,et al.  Development of a nano-Al∕CuO based energetic material on silicon substrate , 2007 .

[36]  Kaili Zhang,et al.  A Nano Initiator Realized by Integrating Al/CuO-Based Nanoenergetic Materials With a Au/Pt/Cr Microheater , 2008, Journal of Microelectromechanical Systems.

[37]  C. Rossi,et al.  Synthesis process of nanowired Al/CuO thermite , 2010 .

[38]  E. Dreizin,et al.  Fully Dense, Aluminum-Rich Al-CuO Nanocomposite Powders for Energetic Formulations , 2008 .