Advanced high performance CCD technology for a 1/4-inch 560 k pixel IT-CCD image sensor [HDTV]

We have successfully developed a 1/4-inch 560 k IT(Interline Transfer)-CCD image sensor with electronic image stabilizer(EIS) function. Newly developed pixel-design, process, and on-chip color filter technology can reduce the pixel size to 5.7 /spl mu/m(H) by 5.9 /spl mu/m(V), keeping its device characteristics almost equal to the conventional 1/3-inch 360 k pixel IT-CCD.<<ETX>>

[1]  Sumio Terakawa,et al.  Submicron spaced lens array process technology for a high photosensitivity CCD image sensor , 1990, International Technical Digest on Electron Devices.