Dynamic analysis of fast piezo steering mirror

In this paper the construction and the operating principle of the fast piezo steering mirror are introduced, and the differential equation of the tilting motion is established according to the Lagrange's equation, the formula of the natural frequency is derived. The model analysis of the fast steering mirror is also carried out with the help of limited element analysis. The theoretic result fits with the result of experiment. The model results can be provided for the construction design of the fast steering mirror. 