A test setup for the characterization of Lorentz-force MEMS magnetometers

Lorentz-force Microelectromechanical Systems (MEMS) magnetometers have been proposed to replace magnetometers in current consumer electronics products. As a result, there exist numerous works that propose MEMS transducers and readout systems. However, when it comes to the characterization of MEMS devices, a wide variety of strategies and instruments are used, making it difficult to compare results from different works. In this article, a test setup for the characterization of Lorentz-force MEMS magnetometers is proposed. The solution in based in the use of an impedance analyser along with a simple and flexible circuit that provides the in-phase driving of the voltage and the current of the MEMS. The proposed solution has been successfully used to characterize MEMS magnetometers with very different characteristics.

[1]  D. Horsley,et al.  Single-structure 3-axis lorentz force magnetometer with sub-30 nT/√HZ resolution , 2014, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS).

[2]  Thilo Sauter,et al.  Principles of nonlinear MEMS-resonators regarding magnetic-field detection and the interaction with a capacitive read-out system , 2014 .

[3]  Ching-Liang Dai,et al.  Fabrication and Characterization of CMOS-MEMS Magnetic Microsensors , 2013, Sensors.

[4]  Matthias Wietstruck,et al.  Experiments on MEMS Integration in 0.25 μm CMOS Process , 2018, Sensors.

[5]  Y. Liu,et al.  Development of multi-axes CMOS-MEMS resonant magnetic sensor using Lorentz and electromagnetic forces , 2013, 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).

[6]  Joshua E.-Y. Lee,et al.  An ultra-sensitive piezoelectric-on-silicon flapping mode MEMS lateral field magnetometer , 2017, 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFC).

[7]  Jordi Madrenas,et al.  Characterization of CMOS-MEMS Resonant Pressure Sensors , 2017, IEEE Sensors Journal.

[8]  Matteo Bruggi,et al.  An Efficient Earth Magnetic Field MEMS Sensor: Modeling, Experimental Results, and Optimization , 2015, Journal of Microelectromechanical Systems.

[9]  Thomas W. Kenny,et al.  Dual-resonator MEMS Lorentz force magnetometer based on differential frequency modulation , 2017, 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL).

[10]  David A. Horsley,et al.  Extended Bandwidth Lorentz Force Magnetometer Based on Quadrature Frequency Modulation , 2015, Journal of Microelectromechanical Systems.

[11]  D. Horsley,et al.  Dual-resonator MEMS magnetic sensor with differential amplitude modulation , 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

[12]  C. Shafai,et al.  A micromachined magnetometer with frequency modulation at the output , 2005, IEEE Sensors, 2005..

[13]  Mourad N. El-Gamal,et al.  Surface Micromachined Combined Magnetometer/Accelerometer for Above-IC Integration , 2015, Journal of Microelectromechanical Systems.

[14]  David A. Horsley,et al.  Area-Efficient Three Axis MEMS Lorentz Force Magnetometer , 2013, IEEE Sensors Journal.

[15]  Giacomo Langfelder,et al.  Operation of Lorentz-Force MEMS Magnetometers With a Frequency Offset Between Driving Current and Mechanical Resonance , 2014, IEEE Transactions on Magnetics.

[16]  Jordi Madrenas,et al.  A Mixed-Signal Control System for Lorentz-Force Resonant MEMS Magnetometers , 2019, IEEE Sensors Journal.

[17]  S. Ranvier,et al.  Poly-SiGe-based MEMS Xylophone Bar Magnetometer , 2012, 2012 IEEE Sensors.