Lens Heating Induced Focus Drift of i-line Step & Scan: Correction and Control in a Manufacturing Environment

The lens heating (LH) induced focus drift of the ASML i-line Step & Scan was measured at five NA/Sigma settings: three ASML default and two TSMC production settings. The new LH scaling constants at three ASML settings, when multiplied by a dose-matching factor for production, agreed well with the default constants. Experimental results at NAI11 of 0.21 0.228