Tunable piezoresistance and noise in gate-all-around nanowire field-effect-transistor

The piezoresistance and noise of n-type gate-all-around nanowire field-effect-transistor (NWFET) is investigated as a function of gate bias. With narrow gate bias span of 0.6 V near threshold region, the piezoresistive coefficient of NWFET enhances up to seven times from 29 × 10−11 Pa−1 to 207 × 10−11 Pa−1 under compressive and tensile strain conditions. Results reveal that the low frequency noise is reduced when operated in subthreshold region. The higher piezoresistive coefficient and reduced noise improve the sensor resolution (minimum detectable strain) by sixteen times. NWFET operates at low bias with higher piezoresistance and signal-to-noise ratio and offers promising applications in strain sensors.

[1]  J. Milne,et al.  Giant piezoresistance effects in silicon nanowires and microwires. , 2010, Physical review letters.

[2]  O. N. Tufte,et al.  Piezoresistive Properties of Silicon Diffused Layers , 1963 .

[3]  P. Yang,et al.  Giant piezoresistance effect in silicon nanowires , 2006, Nature nanotechnology.

[4]  Nanomechanoelectronic signal transduction scheme with metal-oxide-semiconductor field-effect transistor-embedded microcantilevers , 2009 .

[5]  G. Dorda,et al.  Piezoresistance in Quantized Conduction Bands in Silicon Inversion Layers , 1971 .

[6]  Ru Huang,et al.  Investigation of Low-Frequency Noise in Silicon Nanowire MOSFETs , 2009, IEEE Electron Device Letters.

[7]  C. Hierold,et al.  Signal-to-noise ratio in carbon nanotube electromechanical piezoresistive sensors. , 2010, Nano letters.

[8]  S. Thompson,et al.  Uniaxial-process-induced strained-Si: extending the CMOS roadmap , 2006, IEEE Transactions on Electron Devices.

[9]  Richard C. Jaeger,et al.  Piezoresistive characteristics of short-channel MOSFETs on (100) silicon , 2001 .

[10]  Julien Reboud,et al.  Electrically controlled giant piezoresistance in silicon nanowires. , 2010, Nano letters.

[11]  Charles S. Smith Piezoresistance Effect in Germanium and Silicon , 1954 .

[12]  Beth L. Pruitt,et al.  Review: Semiconductor Piezoresistance for Microsystems , 2009, Proceedings of the IEEE.

[13]  Hiroaki Mikoshiba,et al.  Stress-sensitive properties of silicon-gate MOS devices , 1981 .

[14]  Yong-Zhong Xiong,et al.  Investigation of Low-Frequency Noise in Silicon Nanowire MOSFETs in the Subthreshold Region , 2009, IEEE Electron Device Letters.

[15]  Zhong Lin Wang,et al.  Piezoelectric field effect transistor and nanoforce sensor based on a single ZnO nanowire. , 2006, Nano letters.