论文信息 - Focused-Ion-Beam Fabricated Vertical Fiber Couplers on Silicon-on-Insulator Waveguides - 字舞流文

Focused-Ion-Beam Fabricated Vertical Fiber Couplers on Silicon-on-Insulator Waveguides

We fabricated grating couplers in silicon-on-insulator waveguides with focused-ion-beam. First devices were very lossy, but by using selective etchant and a hard mask we obtained efficiencies comparable to traditional fabrication techniques

D. Van Thourhout | R. Baets | R. Baets | D. van Thourhout | J. Schrauwen | J. Schrauwen

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