论文信息 - A study of nucleation in chemically grown epitaxial silicon films using molecular beam techniques. IV. Additional confirmation of the induction period and nucleation mechanisms

A study of nucleation in chemically grown epitaxial silicon films using molecular beam techniques. IV. Additional confirmation of the induction period and nucleation mechanisms

Abstract Epitaxial silicon films have been grown on (100) substrates by the pyrolysis of silane using the molecular beam method. For a given set of growth conditions an induction period, corresponding to removal of the residual surface oxide film as SiO, is required before growth centres form. When subsequently the growth conditions are abruptly changed without switching off the beam, it is found that no further induction period is required (i.e. the surface produced by the first stage is ‘clean') and that a second set of growth centres, commensurate with the new growth conditions, is formed. The conclusions of the previous paper (Joyce et al. 1967) are thus substantiated.

B. Watts | G. Booker | R. Bradley | B. Joyce

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[3] B. A. Joyce,et al. A study of nucleation in chemically grown epitaxial silicon films using molecular beam techniques: II. initial growth behaviour on clean and carbon-contaminated silicon substrates , 1966 .

[4] R. Bradley,et al. A study of nucleation in chemically grown epitaxial silicon films using molecular beam techniques I.—experimental methods , 1966 .