Analysis of effects of retroreflector motion errors on measurement accuracy of a homodyne interferometer

In this paper, the influences of the motion errors of the corner cube retroreflector, not only the pitch and yaw errors but also the straightness and roll errors, on the positioning measurement accuracy are comprehensively analyzed. An error compensation model for reducing the influences of the motion errors is proposed. In addition, the effects of the motion errors of corner cube retroreflector on the quality of the interference signals is also investigated. A series of experiments are carried out to verify the effectiveness of the proposed error compensation model.