论文信息 - Phase formation and thermal stability of ultrathin nickel-silicides on Si(100) - 字舞流文

Phase formation and thermal stability of ultrathin nickel-silicides on Si(100)

H. Bender | C. Detavernier | J. Jordan-Sweet | C. Lavoie | W. Vandervorst | R. L. Meirhaeghe | E. Verleysen | K. D. Keyser | C. V. Bockstael