Small Angle X-Ray Scattering for Sub-100 nm Pattern Characterization
暂无分享,去创建一个
Wen-li Wu | George G. Barclay | Patrick J. Bolton | Eric K. Lin | Ronald L. Jones | Tengjiao Hu | Wen-Li Wu | E. Lin | P. Bolton | Ronald Jones | G. Barclay | D. Casa | Diego Casa | T. Hu | R. Kolb | Rainer Kolb
[1] Shen,et al. X-ray diffraction from a coherently illuminated Si(001) grating surface. , 1993, Physical review. B, Condensed matter.
[2] Richard A. Allen,et al. Intercomparison of SEM, AFM, and electrical linewidths , 1999, Advanced Lithography.
[3] T. Baumbach,et al. X‐ray diffraction reciprocal space mapping of a GaAs surface grating , 1993 .
[4] Ullrich Pietsch,et al. Grazing incidence diffraction by epitaxial multilayered gratings , 1998 .
[5] J. McNeil,et al. Multiparameter grating metrology using optical scatterometry , 1997 .
[6] Kotthaus,et al. X-ray diffraction from laterally structured surfaces: Total external reflection. , 1995, Physical review. B, Condensed matter.
[7] Wen-li Wu,et al. Structural characterizaton of deep-submicron lithographic structures using small-angle neutron scattering , 2002, SPIE Advanced Lithography.
[8] S. C. Palmateer,et al. Comparison of metrology methods for quantifying the line edge roughness of patterned features , 1999 .
[9] J.J.M. Binsma,et al. High resolution x‐ray diffraction of periodic surface gratings , 1993 .
[10] Wen-li Wu,et al. Small angle neutron scattering measurements of nanoscale lithographic features , 2000 .
[11] Václav Holý,et al. High-resolution x-ray diffraction from self-organized PbSe/PbEuTe quantum dot superlattices , 2001 .