High endurance strategies for hafnium oxide based ferroelectric field effect transistor
暂无分享,去创建一个
M. Trentzsch | S. Flachowsky | H. Mulaosmanovic | S. Slesazeck | J. Ocker | P. Polakowski | T. Mikolajick | J. Muller | S. Slesazeck | T. Mikolajick | J. Muller | M. Trentzsch | H. Mulaosmanovic | J. Ocker | S. Müller | P. Polakowski | S. Flachowsky | S. Muller | J. Müller | S. Muller | S. Flachowsky
[1] Y. Morita,et al. Preparation of epitaxial HfO2 film (EOT=0.5 nm) on Si substrate using atomic-layer deposition of amorphous film and rapid thermal crystallization (RTC) in an abrupt temperature gradient , 2010, 2010 International Electron Devices Meeting.
[2] H. Funakubo,et al. Growth of epitaxial orthorhombic YO1.5-substituted HfO2 thin film , 2015 .
[3] Albert Chin,et al. Low-Leakage-Current DRAM-Like Memory Using a One-Transistor Ferroelectric MOSFET With a Hf-Based Gate Dielectric , 2014, IEEE Electron Device Letters.
[4] H. Funakubo,et al. Orientation control and domain structure analysis of {100}-oriented epitaxial ferroelectric orthorhombic HfO2-based thin films , 2016 .
[5] Sergei V. Kalinin,et al. Ferroelectric hafnium oxide: A CMOS-compatible and highly scalable approach to future ferroelectric memories , 2013, 2013 IEEE International Electron Devices Meeting.
[6] J. Robertson. High dielectric constant gate oxides for metal oxide Si transistors , 2006 .
[7] T. Mikolajick,et al. Ferroelectric Hafnium Oxide A Game Changer to FRAM? , 2014, 2014 14th Annual Non-Volatile Memory Technology Symposium (NVMTS).
[8] S. Slesazeck,et al. Influence of nitrogen trap states on the electronic properties of high-k metal gate transistors , 2014, 2014 IEEE International Integrated Reliability Workshop Final Report (IIRW).
[9] D. Schlom,et al. Thermodynamic stability of binary oxides in contact With silicon , 1996 .
[10] Tengyu Ma,et al. Why is nonvolatile ferroelectric memory field-effect transistor still elusive? , 2002, IEEE Electron Device Letters.
[11] Jacob L. Jones,et al. Ferroelectric Si-Doped HfO2 Device Properties on Highly Doped Germanium , 2015, IEEE Electron Device Letters.
[12] Meishoku Masahara,et al. Two-step annealing effects on ultrathin EOT higher-k (k = 40) ALD-HfO2 gate stacks , 2012, 2012 Proceedings of the European Solid-State Device Research Conference (ESSDERC).
[13] Paul J. McWhorter,et al. Physics of the ferroelectric nonvolatile memory field effect transistor , 1992 .
[14] Tom Herrmann,et al. Performance investigation and optimization of Si:HfO2 FeFETs on a 28 nm bulk technology , 2013, 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy (ISAF/PFM).
[15] Sung-Min Yoon,et al. Adaptive-Learning Synaptic Devices Using Ferroelectric-Gate Field-Effect Transistors for Neuromorphic Applications , 2020, Topics in Applied Physics.
[16] R. Hoffmann,et al. Nanosecond Polarization Switching and Long Retention in a Novel MFIS-FET Based on Ferroelectric $\hbox{HfO}_{2}$ , 2012, IEEE Electron Device Letters.
[17] Chun-Yen Chang,et al. Low power 1T DRAM/NVM versatile memory featuring steep sub-60-mV/decade operation, fast 20-ns speed, and robust 85°C-extrapolated 1016 endurance , 2015, 2015 Symposium on VLSI Technology (VLSI Technology).
[18] G. Pourtois,et al. Identification of the ferroelectric switching process and dopant-dependent switching properties in orthorhombic HfO2: A first principles insight , 2014 .
[19] S. Flachowsky,et al. Evidence of single domain switching in hafnium oxide based FeFETs: Enabler for multi-level FeFET memory cells , 2015, 2015 IEEE International Electron Devices Meeting (IEDM).
[20] Eiichi Murakami,et al. Effect of nitrogen at SiO2/Si interface on reliability issues—negative-bias-temperature instability and Fowler–Nordheim-stress degradation , 2002 .
[21] S. Slesazeck,et al. Origin of the endurance degradation in the novel HfO2-based 1T ferroelectric non-volatile memories , 2014, 2014 IEEE International Reliability Physics Symposium.
[22] Shogo Nakamura,et al. Solid state epitaxy of (Hf,Zr)O2 thin films with orthorhombic phase , 2016 .
[23] J. Muller,et al. Ferroelectric deep trench capacitors based on Al:HfO2 for 3D nonvolatile memory applications , 2014, 2014 IEEE 6th International Memory Workshop (IMW).
[24] F. Preisach. Über die magnetische Nachwirkung , 1935 .
[25] Hiroshi Ishiwara,et al. Low Voltage Operation of Nonvolatile Metal-Ferroelectric-Metal-Insulator-Semiconductor (MFMIS)-Field-Effect-Transistors (FETs) Using Pt/SrBi2Ta2O9/Pt/SrTa2O6/SiON/Si Structures , 2001 .